ATOVAC Enhanced Convection Gauge EG301

Description

EG301 Enhanced Convection Gague

Generally installed in a vacuum chamber, it is a gauge that reads the actual pressure in the vacuum chamber, and requires +24 VDC (15 VDC possible) power.

EG301 Enhanced Convection Gauge with 3~10 VDC signal output is used in semiconductor process and vacuum equipment.

Features & Benefits

■ A wide range of pressure measurements is possible (2.0 X 10-4 to 760 Torr).

■ High accuracy and increased floor space efficiency.

■ Analog Output is provided so that it can be directly connected to PLC and other devices for display.

■ Can be read from a distance due to adoption of 7-segment LED.

■ PC can be controlled using RS-485.

■ Two Set-Points are provided for use in external devices and processes.

■ It can be repaired at a low cost (replacement of the sensor wire).

■ Can be used alone without the need for a controller.

Specifications

Physical
Input Power	+24 VDC (15 VDC 가능)
Output Power	+3 VDC to 10 VDC
Operating Temperature	0 ~ 50°c
Pressure Range	2.0 X 10-4 ~ 760 Torr
Display Window	7-segment LED
Display Unit	Torr
Mounting Position	Horizontal
Filament	Platinum 99.999 %
Flanges	NW16 ISO-KF , NW25 ISO-KF, 1/4 VCR Female, CF Flange
Interface	Analog Output, RS-485 , 2 Set-Point

 

 

 

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