Extorr XT Series Residual Gas Analyzer

Brand: Extorr
Model:XT Series
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Description

The XT Series Residual Gas Analyzer (RGA) from Extorr offers exceptional performance and value. These RGAs provide a more detailed vacuum gas analysis than is offered by any other single competitive device. Each system comes complete with a multi-gauged quadrupole probe, encompassing built-in Pirani and Ion gauges, a control and communications unit (CCU), and a real-time Windows software package.

Features

  • Residual Gas Analyzer with Integrated Pirani and Ion Gauge 100, 200 and 300 amu systems
  • Faraday Detector with optional Electron Multiplier
  • Field Replaceable Dual Thoriated Iridium Filaments
  • Better than 0.5 amu resolution @ 10% peak height
  • 9 orders of magnitude dynamic range in a single scan
  • Mass spectra, leak detection and pressure vs. time modes

Applications

  • Leak testing
  • Process monitoring
  • Pump-down and bakeout monitoring
  • Vacuum diagnosis
  • Gas and contaminant identification

Specifications

Specification Value
Mass range
XT100 1-100 amu Faraday cup (FC)
XT200 1-200 amu Faraday cup (FC)
XT300 1-300 amu Faraday cup (FC)
XT100M 1-100 amu Faraday cup (FC) and Electron Multiplier (EM)
XT200M 1-200 amu Faraday cup (FC) and Electron Multiplier (EM)
XT300M 1-300 amu Faraday cup (FC) and Electron Multiplier (EM)
Mass filter type
Quadrupole
Detector type
Faraday cup (FC), Standard Electron Multiplier (EM), Optional
Resolution
Better than 0.5 amu @ 10% peak height. Adjustable to constant peak width throughout the mass range.
Sensitivity (A/Torr)
6 x 10-4 (FC). Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70eV electron energy, 6eV ion energy and 2mA electron emission.
Minimum detectable partial pressure
Detector Type Dwell Minimum Detectable Partial Pressure (Torr)
Faraday Cup 200 ms 2.4 x 10-12 *
7.2 x 10-12 **
Faraday Cup 5 seconds 5 x 10-13 *
1.5 x 10-12 **
Electron Multiplier 200 ms 1 x 10-14 *
3 x 10-14 **
Electron Multiplier 5 seconds 2 x 10-15 *
6 x 10-15 **

* Measured by calculating one standard deviation of the baseline noise divided by the sensitivity for nitrogen.
** Measured by calculating three standard deviations of the baseline noise divided by the sensitivity for nitrogen.
Pirani gauge operating range
10-3 Torr to ATM
Ion gauge operating range
below 5 x 10-3 Torr
Partial pressures operating range
below 10-4 Torr
Operating temperature
50 °C Electronics, 100 °C Probe
Bakeout temperature
300 °C (Probe only, CCU removed)
Total pressure measurement
2 x 10-10 Torr to ATM
Probe Materials
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel, Thoria, Platinum
Ionizer Design
Open ion source, electron impact ionization
Filament
Dual thoria coated iridium with firmware protection. Built-in 1 to 30W degas ramp-up. Field replaceable.
Electron energy
11 to 150 eV, programmable
Ion energy
1 to 12 eV, programmable
Focus Voltage
0 to 150 V, programmable
Electron emission current
0.1 to 4 mA, programmable
Probe Dimensions
6.8″ from flange face to top of ionizer
Probe mounting flange
2.75″ CF
Minimum tube I.D.
1.375″
CCU Dimensions
3.3″ x 4.8″ x 7.4″ Easily separated from probe for bakeout.
CCU Extension
6.2″ from flange face with mounting hardware.
Warm-up time
Mass stability ± 0.1 amu after 30 minutes.
Minimum PC Requirements
PC running Windows 2000, XP, 7, 8, 10, or 11 with at least 1024 x 768 graphics, keyboard, mouse and 1 Unused USB or RS- 232C Port.
Software
Included VacuumPlus Windows based application.
Power requirement
24 VDC @ 2.5 Amps. 120/240 VAC adaptor included.
Weight
9 lbs. Total, Probe and CCU.

 

 

 

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