Sinton Inline Wafer Lifetime Testing IL-800

Fast, inline testing with no compromises. Monitor wafer lifetime, sheet resistance, and trapping with the comprehensive accuracy of an offline tool and optimized industrial software package.

Primary application:

Step-by-step monitoring and optimization of the production line, using measurements on product wafers at key stages in the process.

Other Applications:

-Monitoring incoming wafer quality (ifetime, sheet resistance, and trapping)

-Monitoring phosphorus diffusion quality

一Early detection of wafer contamination from water, chemicals, furnaces, or wafer handling during the process

一Maintaining optimal surface passivation quality from the nitride deposition

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