辛顿终身磨损 WCT-120PL

The WCT-120PL wafer lifetime measurement tool showcases the same unique measurement and analysis techniques as the WCT- 120 with the added capability of a photoluminescence (PL) detector to measure the PL lifetime and doping of the sample under test. Both the Quasi-Steady-State -Photoconductance (QSSPC) lifetime measurement method and the Transient Photo-conductance Decay (PCD) lifetimne measurement method are complemented with a calibrated PL lifetime measurement. The tool can also easily be used as a standard WCT-120.

主要应用：

Step-by-step monitoring and optimization of a fabrication process using the QSSPC or Transient lifetime measurement alongside a PL measurement.

其他应用：

-监测初始材料质量

-检测晶片加工过程中的重金属污染

-评估表面钝化和发射器掺杂扩散

-Evaluating process-induced shunting using the implied-Voc measurement

-Iteratively calculate substrate doping from QSSPL and QSSPC data

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